Superconducting Properties of YBaCuO Thin Films Grown by RF Magnetron Sputtering.
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چکیده
منابع مشابه
Nanocrystalline GaN and GaN:H Films Grown by RF-Magnetron Sputtering
The structural and optical properties of nanocrystalline GaN and GaN:H films grown by RF-magnetron sputtering are focused here. The films were grown using a Ga target and a variety of deposition parameters (N2/H2/Arflow rates, RF power, and substrate temperatures). Si (100) and fused silica substrates were used at relatively low temperatures (Ts ≤ 420K). The main effects resulting from the depo...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1992
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.35.215